Full - chain technology product matrix・Covering three core fields of electronics, chemicals, and materials
Electronic special gases
As the second - largest consumable in the wafer manufacturing process, electronic special gases account for nearly 14%, second only to silicon wafers. They are widely used in process steps such as lithography, etching, film formation, cleaning, doping, and deposition. Our company's electronic special gas products mainly include nitrogen trifluoride, tungsten hexafluoride, hexafluorobutadiene, ammonia, etc., and are produced in liquid and bottled gas production modes.
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